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Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets - Springer Theses Maria Angela Pampillon Arce Softcover reprint of the original 1st ed. 2017 edition
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Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets - Springer Theses
Maria Angela Pampillon Arce
This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets.
164 pages, 6 Tables, color; 6 Illustrations, color; 110 Illustrations, black and white; XXIII, 164 p
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | May 18, 2018 |
| ISBN13 | 9783319882840 |
| Publishers | Springer International Publishing AG |
| Pages | 164 |
| Dimensions | 150 × 220 × 10 mm · 285 g |
| Language | German |
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